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Vacuum Systems

Booster Pumping System

VSB(Dry Type) Series
  VSB -5K VSB -10K VSB -20K VSB -40K VSB -80K VSB -160K
Pumping speed(m³/hr) 60Hz 215 600 1200 2420 4700 9600
50Hz 180 500 1000 2010 3850 8000
Ultimate Pressure 5.3 X 10-4 Torr (7.2 X 10-2 Pa)
Motor Power(kW) 1.9 13.2 19 29.5 40.5 59
Inlet Port(A) 80 100 100 150 200 300
Outlet Port(A) 40 40 50 80 80 80
Weight(kg) 132 465 585 890 1325 2185

Reserve Tank System

This equipment is a reserve tank system, which is a central vacuum supply device. It is an equipment capable of performing necessary operations in a state where the inside of a tank is made into a vacuum when using vacuum pump. It has high energy efficiency for continuous processes.

Automatic He Leak Tester System

This equipment is an automated helium leakage inspection equipment using vacuum confidentiality that accurately identifies fine leakage parts and defects for various products, which can reduce expensive helium costs by recovering more than 90% of helium gas as one of its main features.

High Vacuum Test & Calibration System

This is an equipment that can utilize a system that uses quadrupole mass spectrometers(hereinafter referred to as QMS) in addition to research on vacuum drilling technology and comprehensive performance evaluation of vacuum pumps. It is an based on evaluation procedures according to international standards such as ISO and AVS to secure reliability.

Glove Box

This is an equipment that prevents contamination when handling substances sensitive to moisture, oxygen etc., and is a sealed box substituted with a high-purity inert gas to suppress the chemical reaction of the material. This device can perform the necessary work inside a box through a glove attached to a transparent window, and can store or take out materials. A dedicated purifier is used to maintain the oxygen and moisture contents inside the box below 1 ppm.

Hyper Tube System

This is a vacuum chamber airtightness test system for a partial vacuum tube, a basic test stage of Hyper Tube, one of the future transportation technologies. The system aims to secure basic data to determine the batch quantity of vacuum pumps in future verification tests, by measuring conditions for vacuum formation and vacuum maintenance in vacuum tubes operated by ultra-high-speed trains, and the pumping time until the goal vacuum level(1mbar) is achieved according to changes in pipe conductance under atmospheric pressure.

Thermal Vacuum Chamber

Extreme environment ground large thermal vacuum chamber
- Space environment simulator
Pilot-scale thermal vacuum chamber
- Space environment simulator.

One of the space environment simulation equipment, the extreme environment ground thermal vacuum chamber simulates the moon environment to enable performance testing in the moon environment. It reproduces ultra-high vacuum environment, cryogenic temperature, and solar radiation heat. It can establish simulation technologies also for the space environment, provide guidelines for the design and production of large chambers, and secure test technologies based on the moon and space environment for future space tests.

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